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宏观部件的微加工 一 激光光源和应用的新进展

演讲课题:宏观部件的微加工 一 激光光源和应用的新进展

演讲人:杜可明

演讲摘要:

超短脉冲激光加工通常以非常低的热影响和高精度而闻名,它因这些特性而迅速地被应用到很多行业的微零件加工中,比如显示、印刷、电子元件和半导体等。目前,我们已经完成了小零件的微加工。将精确加工拓展到宏观部件的潜力是巨大的。 在宏观部件的微加工中开发应用的其他主要挑战包括:缩放超短脉冲的功率,光束工程;在高功率/能量负载下提高光学组件的性能;开发高功率/能量束传输和处理技术,以及了解材料超短脉冲的相互作用基础。 为了将微精度传递给宏观部件,没有普遍适用的解决方案。相反,解决方案将根据具体情况而定制。在这次演讲中,我们将介绍并讨论: - 高能量超短脉冲激光器和具有干涉方法的高效生成功能表面 - 中等脉冲能量的高平均功率超短脉冲激光和多波束技术的高速雕刻 - 使用空间光调制器SLM进行高速标记 - 压印滚筒的高速雕刻 - 高度灵活的超脉冲激光触发 Laser processing with ultra-short pulse lasers is generally known for very low thermal influence and high precision. The features are rapidly being adapted for processing of micro parts in variety of industries, like display, printing, electronics and semiconductor. So far, we have accomplished the micromachining of small parts. There is huge potential to scale the precision processing to macro parts. Among other major challenges to exploit application in micro processing of macro parts are: scaling the power of ultra-short pulse, beam engineering; improving performances of optical components under high power/energy load; developing technology for delivering and handling of high power/energy beams and understanding of interaction fundamentals of ultra-short pulse with materials. For transferring micro precision to macro parts there is no generally applicable solution. Instead, solutions will be tailored and application specific. In this talk we will present and discuss -high energy ultra-short pulse lasers and highly productive generating of functional surfaces with interference approach -high average power ultra-short pulse lasers of moderate pulse energy and high-speed engraving with multibeam technique -high speed marking by using spatial light modulator SLM -high speed engraving of embossing cylinders -highly flexible triggering of ultra-pulse lasers

杜可明

EdgeWave GmbH 总裁

在30年的激光理论和技术的研究和开发工作中,发表了100多篇具有世界前沿水平的论文,申请并获得70多项专利。率先提出一系列高功率半导体激光整形和光纤传输理论和方案, 首创激光在玻璃精细加工上的新技术, 这些技术已被广泛应用于光伏产业和触摸显示屏产业。 InnoSlab 激光技术由于它的杰出特征开辟了短脉冲及超短脉冲激光新领域。 InnoSlab激光器和放大器具有其它类型激光器难以匹敌的独特优势, 代表了新一代激光光源。 为Opt. Lett., Appl. Opt., Opt. Comm 等世界权威光电杂志审稿人。2001年被欧洲共同体聘为光电技术项目评审专家.。2002年以激光专家身份应邀随联邦德国科技部激光代表团回国访问。 2005年应邀随联邦科技部激光产业代表团回国访问。2010年随德国光电技术专家代表团回国访问。2010年由于对InnoSlab激光的杰出贡献荣获德国亚琛国际激光技术大会颁发的激光技术创新奖一等奖。2012 年获德国弗劳恩霍夫奖---斯蒂芙特科学奖Stiftervervband Science Prize.一等奖和德国来宾尔创新奖Leibinger Innovationspreis 2012  二等奖。2012年参与的项目3D micro-structuring of large scale metal surfaces for embossing and printing applications with high ps laser获德国亚琛国际激光技术大会激光技术创新奖Innovation Award Laser Technology 2012一等奖. 德国亚琛激光技术学会会士和欧洲激光技术研究学会会士。International Academy of Photonics and Laser Engineer会士。2015年获美国激光学会Laser Institutes of America)2015年度肖洛奖。


Dr. rer. nat. Dipl.-Phys. Keming Du has been working with the development of laser technology since 1985 beginning with high power CO2 lasers, through diode lasers and to diode pumped solid state lasers. From 1985 to 2001 he worked at the Fraunhofer Institute for Laser Technology, as the project manager, group leader and department head of high power lasers. In 2001 he founded the EdgeWave GmbH, which offers innovative solutions in the field compact diode pumped solid state lasers for different applications. He is Fellow of ELI, AKL and IAPLE. In 2013 he was nominated as Senat of BWA Germany. He is the winner of the 1st prize of the "Innovation award laser technology 2010” granted by AKL (Arbeitskreis Lasertechnik e.V.) and ELI (European Laser Institute) in May 2010. In Mai 2012 his project team Pikoflatgroup won the 1st prize of the "Innovation award laser technology 2012" granted by AKL and ELI. Based on InnoSlab laser and amplifier his project team received the Stifterverband’s Science Award 2012 and the 2. Leibinger price 2012, for the pioneering and excellent work in the field of short and ultra-short pulse lasers based on InnoSlab laser and InnoSlab amplifier. He is the winner of Arthur L. Schawlow Award 2015 from Laser Institute of America. 


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