宏观部件的微加工 一 激光光源和应用的新进展
演讲课题:宏观部件的微加工 一 激光光源和应用的新进展
演讲人:杜可明
演讲摘要:
超短脉冲激光加工通常以非常低的热影响和高精度而闻名,它因这些特性而迅速地被应用到很多行业的微零件加工中,比如显示、印刷、电子元件和半导体等。目前,我们已经完成了小零件的微加工。将精确加工拓展到宏观部件的潜力是巨大的。 在宏观部件的微加工中开发应用的其他主要挑战包括:缩放超短脉冲的功率,光束工程;在高功率/能量负载下提高光学组件的性能;开发高功率/能量束传输和处理技术,以及了解材料超短脉冲的相互作用基础。 为了将微精度传递给宏观部件,没有普遍适用的解决方案。相反,解决方案将根据具体情况而定制。在这次演讲中,我们将介绍并讨论: - 高能量超短脉冲激光器和具有干涉方法的高效生成功能表面 - 中等脉冲能量的高平均功率超短脉冲激光和多波束技术的高速雕刻 - 使用空间光调制器SLM进行高速标记 - 压印滚筒的高速雕刻 - 高度灵活的超脉冲激光触发 Laser processing with ultra-short pulse lasers is generally known for very low thermal influence and high precision. The features are rapidly being adapted for processing of micro parts in variety of industries, like display, printing, electronics and semiconductor. So far, we have accomplished the micromachining of small parts. There is huge potential to scale the precision processing to macro parts. Among other major challenges to exploit application in micro processing of macro parts are: scaling the power of ultra-short pulse, beam engineering; improving performances of optical components under high power/energy load; developing technology for delivering and handling of high power/energy beams and understanding of interaction fundamentals of ultra-short pulse with materials. For transferring micro precision to macro parts there is no generally applicable solution. Instead, solutions will be tailored and application specific. In this talk we will present and discuss -high energy ultra-short pulse lasers and highly productive generating of functional surfaces with interference approach -high average power ultra-short pulse lasers of moderate pulse energy and high-speed engraving with multibeam technique -high speed marking by using spatial light modulator SLM -high speed engraving of embossing cylinders -highly flexible triggering of ultra-pulse lasers